A novel thick-film PZT/micromachined silicon accelerometer
A novel thick-film PZT/micromachined silicon accelerometer
2060-62
Beeby, SP
ba565001-2812-4300-89f1-fe5a437ecb0d
Ross, JN
0a5fe4de-ef4a-44aa-a4ff-0e985cde44c8
White, NM
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
November 1999
Beeby, SP
ba565001-2812-4300-89f1-fe5a437ecb0d
Ross, JN
0a5fe4de-ef4a-44aa-a4ff-0e985cde44c8
White, NM
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Beeby, SP, Ross, JN and White, NM
(1999)
A novel thick-film PZT/micromachined silicon accelerometer.
Electronics Letters, 25 (23), .
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Published date: November 1999
Organisations:
EEE
Identifiers
Local EPrints ID: 251293
URI: http://eprints.soton.ac.uk/id/eprint/251293
ISSN: 0013-5194
PURE UUID: 9370e175-061e-4dcc-a9c2-2eec50cb0975
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Date deposited: 24 Oct 2000
Last modified: 11 Dec 2021 03:01
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Contributors
Author:
SP Beeby
Author:
JN Ross
Author:
NM White
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