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A novel thick-film PZT/micromachined silicon accelerometer

A novel thick-film PZT/micromachined silicon accelerometer
A novel thick-film PZT/micromachined silicon accelerometer
0013-5194
2060-62
Beeby, SP
ba565001-2812-4300-89f1-fe5a437ecb0d
Ross, JN
0a5fe4de-ef4a-44aa-a4ff-0e985cde44c8
White, NM
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Beeby, SP
ba565001-2812-4300-89f1-fe5a437ecb0d
Ross, JN
0a5fe4de-ef4a-44aa-a4ff-0e985cde44c8
White, NM
c7be4c26-e419-4e5c-9420-09fc02e2ac9c

Beeby, SP, Ross, JN and White, NM (1999) A novel thick-film PZT/micromachined silicon accelerometer Electronics Letters, 25, (23), pp. 2060-62.

Record type: Article

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More information

Published date: November 1999
Organisations: EEE

Identifiers

Local EPrints ID: 251293
URI: http://eprints.soton.ac.uk/id/eprint/251293
ISSN: 0013-5194
PURE UUID: 9370e175-061e-4dcc-a9c2-2eec50cb0975
ORCID for SP Beeby: ORCID iD orcid.org/0000-0002-0800-1759
ORCID for NM White: ORCID iD orcid.org/0000-0003-1532-6452

Catalogue record

Date deposited: 24 Oct 2000
Last modified: 18 Jul 2017 10:11

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Contributors

Author: SP Beeby ORCID iD
Author: JN Ross
Author: NM White ORCID iD

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