Hart, M J, Amaratunga, G A J and Evans, A G R (1985) Rapid thermal annealing using a > dual-pulse=scanning electron beam annealing technique.
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More information
Published date: September 1985
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 252026
URI: http://eprints.soton.ac.uk/id/eprint/252026
PURE UUID: 5fb78dd0-19ab-4413-96db-74c9ca8ceb32
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Date deposited: 30 Nov 1999
Last modified: 10 Dec 2021 20:24
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Contributors
Author:
M J Hart
Author:
G A J Amaratunga
Author:
A G R Evans
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