Rapid thermal annealing using a > dual-pulse=scanning electron beam annealing technique


Hart, M J, Amaratunga, G A J and Evans, A G R (1985) Rapid thermal annealing using a > dual-pulse=scanning electron beam annealing technique

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Item Type: Other
Organisations: Nanoelectronics and Nanotechnology
ePrint ID: 252026
Date :
Date Event
September 1985Published
Date Deposited: 30 Nov 1999
Last Modified: 17 Apr 2017 23:38
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/252026

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