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Rapid thermal annealing using a > dual-pulse=scanning electron beam annealing technique

Rapid thermal annealing using a > dual-pulse=scanning electron beam annealing technique
Rapid thermal annealing using a > dual-pulse=scanning electron beam annealing technique
Hart, M J
e4833057-eb19-44aa-9b1c-c86de054a920
Amaratunga, G A J
1167e3a3-ff00-4a7f-92a5-06a2f22c6b5f
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311
Hart, M J
e4833057-eb19-44aa-9b1c-c86de054a920
Amaratunga, G A J
1167e3a3-ff00-4a7f-92a5-06a2f22c6b5f
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311

Hart, M J, Amaratunga, G A J and Evans, A G R (1985) Rapid thermal annealing using a > dual-pulse=scanning electron beam annealing technique.

Record type: Other

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More information

Published date: September 1985
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 252026
URI: https://eprints.soton.ac.uk/id/eprint/252026
PURE UUID: 5fb78dd0-19ab-4413-96db-74c9ca8ceb32

Catalogue record

Date deposited: 30 Nov 1999
Last modified: 18 Jul 2017 10:07

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