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A polysilicon pressure sensor

A polysilicon pressure sensor
A polysilicon pressure sensor
Evans, A.G.R
c4a3f208-8fd9-491d-870f-ce7eef943311
Farooqui, M.M.
1c0f9c64-a0a1-4759-a5de-492f142547ae
Evans, A.G.R
c4a3f208-8fd9-491d-870f-ce7eef943311
Farooqui, M.M.
1c0f9c64-a0a1-4759-a5de-492f142547ae

Evans, A.G.R and Farooqui, M.M. (1986) A polysilicon pressure sensor. IOP meeting on silicon based sensors, , London.

Record type: Conference or Workshop Item (Paper)

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More information

Published date: December 1986
Venue - Dates: IOP meeting on silicon based sensors, , London, 1986-12-08
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 252030
URI: http://eprints.soton.ac.uk/id/eprint/252030
PURE UUID: 9b9ee1d0-c6fe-4ef1-b0a0-73cd8fe8abf7

Catalogue record

Date deposited: 30 Nov 1999
Last modified: 07 Mar 2024 17:50

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Contributors

Author: A.G.R Evans
Author: M.M. Farooqui

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