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A Polysilicon Pressure Sensor

A Polysilicon Pressure Sensor
A Polysilicon Pressure Sensor
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311
Farooqui, M M
1c0f9c64-a0a1-4759-a5de-492f142547ae
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311
Farooqui, M M
1c0f9c64-a0a1-4759-a5de-492f142547ae

Evans, A G R and Farooqui, M M (1986) A Polysilicon Pressure Sensor.

Record type: Other

Full text not available from this repository.

More information

Published date: 1986
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 252030
URI: https://eprints.soton.ac.uk/id/eprint/252030
PURE UUID: 9b9ee1d0-c6fe-4ef1-b0a0-73cd8fe8abf7

Catalogue record

Date deposited: 30 Nov 1999
Last modified: 18 Oct 2018 16:33

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