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A Polysilicon Pressure Sensor

Evans, A G R and Farooqui, M M (1986) A Polysilicon Pressure Sensor

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Published date: 1986
Organisations: Nanoelectronics and Nanotechnology


Local EPrints ID: 252030
PURE UUID: 9b9ee1d0-c6fe-4ef1-b0a0-73cd8fe8abf7

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Date deposited: 30 Nov 1999
Last modified: 18 Jul 2017 10:07

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Author: A G R Evans
Author: M M Farooqui

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