A polysilicon pressure sensor


Evans, A G R and Farooqui, M M (1986) A polysilicon pressure sensor

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Item Type: Other
Organisations: Nanoelectronics and Nanotechnology
ePrint ID: 252034
Date :
Date Event
December 1986Published
Date Deposited: 30 Nov 1999
Last Modified: 17 Apr 2017 23:38
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/252034

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