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A polysilicon pressure sensor

Evans, A G R and Farooqui, M M (1986) A polysilicon pressure sensor

Record type: Other

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Published date: December 1986
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 252034
URI: http://eprints.soton.ac.uk/id/eprint/252034
PURE UUID: a194bc10-95dc-484f-9e6e-ab39e208ffe2

Catalogue record

Date deposited: 30 Nov 1999
Last modified: 18 Jul 2017 10:07

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Contributors

Author: A G R Evans
Author: M M Farooqui

University divisions

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