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Polysilicon strain sensors using shear piezoresistance.

Polysilicon strain sensors using shear piezoresistance.
Polysilicon strain sensors using shear piezoresistance.
French, P J
96a038f4-a5bb-459f-b608-a5b3cf32cd32
Evans, A G R
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French, P J
96a038f4-a5bb-459f-b608-a5b3cf32cd32
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311

French, P J and Evans, A G R (1987) Polysilicon strain sensors using shear piezoresistance.

Record type: Other

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More information

Published date: 1987
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 252039
URI: http://eprints.soton.ac.uk/id/eprint/252039
PURE UUID: d9b862a7-52d2-4ba3-b6ea-5705e85a39c2

Catalogue record

Date deposited: 30 Nov 1999
Last modified: 10 Dec 2021 20:24

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Contributors

Author: P J French
Author: A G R Evans

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