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Polysilicon diaphragms for sensor applications

Polysilicon diaphragms for sensor applications
Polysilicon diaphragms for sensor applications
ITT Colloquium Sensor Update
Farooqui, M M
1c0f9c64-a0a1-4759-a5de-492f142547ae
Roberts, P T E
832cf614-437b-419b-97bf-3a6ada29f002
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311
Farooqui, M M
1c0f9c64-a0a1-4759-a5de-492f142547ae
Roberts, P T E
832cf614-437b-419b-97bf-3a6ada29f002
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311

Farooqui, M M, Roberts, P T E and Evans, A G R (1988) Polysilicon diaphragms for sensor applications.

Record type: Other

Full text not available from this repository.

More information

Published date: March 1988
Additional Information: Address: Southampton
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 252041
URI: https://eprints.soton.ac.uk/id/eprint/252041
PURE UUID: 91fd175d-9c97-4634-af58-815865f597a6

Catalogue record

Date deposited: 30 Nov 1999
Last modified: 18 Jul 2017 10:07

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