Farooqui, M M and Evans, A G R (1988) Polysilicon capacitative pressure sensors.
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Published date: November 1988
Additional Information:
Originally also catalogued with an incorrect 1998 publication year at https://eprints.soton.ac.uk/252043/
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 252043
URI: http://eprints.soton.ac.uk/id/eprint/252043
PURE UUID: afa24d13-50c0-48f2-9b93-6baf3e1dad82
Catalogue record
Date deposited: 30 Nov 1999
Last modified: 09 Apr 2024 16:36
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Contributors
Author:
M M Farooqui
Author:
A G R Evans
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