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Polysilicon capacitative pressure sensors

Farooqui, M M and Evans, A G R (1988) Polysilicon capacitative pressure sensors

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Published date: November 1988
Additional Information: Address: Middlesex
Organisations: Nanoelectronics and Nanotechnology


Local EPrints ID: 252065
PURE UUID: 01eeaa26-c8fa-497a-b3a0-d097cd7e73c8

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Date deposited: 09 Dec 1999
Last modified: 18 Jul 2017 10:07

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Author: M M Farooqui
Author: A G R Evans

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