Farooqui, M M, Roberts, P TE and Evans, A G R (1989) Fabrication of polysilicon diaphragms and allied structures.
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Published date: February 1989
Additional Information:
Address: London
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 252067
URI: http://eprints.soton.ac.uk/id/eprint/252067
PURE UUID: a38d5202-d417-402a-a4f1-a72201978f5c
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Date deposited: 09 Dec 1999
Last modified: 10 Dec 2021 20:24
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Contributors
Author:
M M Farooqui
Author:
P TE Roberts
Author:
A G R Evans
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