Fabrication of polysilicon diaphragms and allied structures


Farooqui, M M, Roberts, P TE and Evans, A G R (1989) Fabrication of polysilicon diaphragms and allied structures

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Item Type: Other
Additional Information: Address: London
Organisations: Nanoelectronics and Nanotechnology
ePrint ID: 252067
Date :
Date Event
February 1989Published
Date Deposited: 09 Dec 1999
Last Modified: 17 Apr 2017 23:38
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/252067

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