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Micromachined sensors for atomic force microscopy

Micromachined sensors for atomic force microscopy
Micromachined sensors for atomic force microscopy
Adam Hilger
Farooqui, M M
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Evans, A G R
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Stedman, M
d24a05dc-7ba0-423c-97ff-5ff971286662
Haycocks, J A
426f38bd-3a9c-4ee0-95df-e78c8d91088b
Farooqui, M M
1c0f9c64-a0a1-4759-a5de-492f142547ae
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311
Stedman, M
d24a05dc-7ba0-423c-97ff-5ff971286662
Haycocks, J A
426f38bd-3a9c-4ee0-95df-e78c8d91088b

Farooqui, M M, Evans, A G R, Stedman, M and Haycocks, J A (1991) Micromachined sensors for atomic force microscopy.

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More information

Published date: 1991
Additional Information: Address: Bristol
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 252245
URI: http://eprints.soton.ac.uk/id/eprint/252245
PURE UUID: 9ae5af6b-366e-4f34-882a-72b90780045b

Catalogue record

Date deposited: 07 Jan 2000
Last modified: 10 Dec 2021 20:26

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Contributors

Author: M M Farooqui
Author: A G R Evans
Author: M Stedman
Author: J A Haycocks

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