The University of Southampton
University of Southampton Institutional Repository

Submicron CMOS devices utilising selective epitaxial (SEG) of silicon using silane only

Record type: Other

Full text not available from this repository.

Citation

Afshar-Nanaii, N, Evans, A G R and Starbuck, C M K (1992) Submicron CMOS devices utilising selective epitaxial (SEG) of silicon using silane only

More information

Published date: September 1992
Additional Information: ESSDERC. Address: Leuven
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 252246
URI: http://eprints.soton.ac.uk/id/eprint/252246
PURE UUID: 66df2c82-7962-4532-9040-bfcc0d32c93f

Catalogue record

Date deposited: 10 Jan 2000
Last modified: 18 Jul 2017 10:05

Export record

Contributors

Author: N Afshar-Nanaii
Author: A G R Evans
Author: C M K Starbuck

University divisions


Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of http://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×