Parker, G.J., Bonar, J.M. and Starbuck, C.M.K. (1991) Long incubation times for selective epitaxial growth of silicon using silane only.
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Published date: August 1991
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 252422
URI: http://eprints.soton.ac.uk/id/eprint/252422
PURE UUID: edf485fc-2a5a-431c-9cf3-aec9a112d63c
Catalogue record
Date deposited: 27 Jan 2000
Last modified: 10 Dec 2021 20:27
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Contributors
Author:
G.J. Parker
Author:
J.M. Bonar
Author:
C.M.K. Starbuck
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