Long incubation times for selective epitaxal growth of silicon using silane only


Parker, G J, Bonar, J M and Starbuck, C M K (1991) Long incubation times for selective epitaxal growth of silicon using silane only

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Item Type: Other
Organisations: Nanoelectronics and Nanotechnology
ePrint ID: 252422
Date :
Date Event
August 1991Published
Date Deposited: 27 Jan 2000
Last Modified: 17 Apr 2017 23:33
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/252422

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