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Long incubation times for selective epitaxial growth of silicon using silane only

Long incubation times for selective epitaxial growth of silicon using silane only
Long incubation times for selective epitaxial growth of silicon using silane only
Parker, G.J.
b140c5a5-94c4-44f3-95a3-c5054a9fe38d
Bonar, J.M.
5ee6b25a-3e67-4a6d-9854-5e1e079d50b8
Starbuck, C.M.K.
a85acc65-f4ee-46aa-a608-817d9993f8fd
Parker, G.J.
b140c5a5-94c4-44f3-95a3-c5054a9fe38d
Bonar, J.M.
5ee6b25a-3e67-4a6d-9854-5e1e079d50b8
Starbuck, C.M.K.
a85acc65-f4ee-46aa-a608-817d9993f8fd

Parker, G.J., Bonar, J.M. and Starbuck, C.M.K. (1991) Long incubation times for selective epitaxial growth of silicon using silane only.

Record type: Other

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More information

Published date: August 1991
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 252422
URI: https://eprints.soton.ac.uk/id/eprint/252422
PURE UUID: edf485fc-2a5a-431c-9cf3-aec9a112d63c

Catalogue record

Date deposited: 27 Jan 2000
Last modified: 18 Dec 2018 17:32

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