Radiant heater assembly for limited reaction-rate processing applications
Radiant heater assembly for limited reaction-rate processing applications
Parker, G J
b140c5a5-94c4-44f3-95a3-c5054a9fe38d
Bonar, J M
5ee6b25a-3e67-4a6d-9854-5e1e079d50b8
Starbuck, C M K
a85acc65-f4ee-46aa-a608-817d9993f8fd
May 1992
Parker, G J
b140c5a5-94c4-44f3-95a3-c5054a9fe38d
Bonar, J M
5ee6b25a-3e67-4a6d-9854-5e1e079d50b8
Starbuck, C M K
a85acc65-f4ee-46aa-a608-817d9993f8fd
Parker, G J, Bonar, J M and Starbuck, C M K
(1992)
Radiant heater assembly for limited reaction-rate processing applications.
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Published date: May 1992
Additional Information:
Chapter: 5
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 252423
URI: http://eprints.soton.ac.uk/id/eprint/252423
PURE UUID: dbb25006-2ebe-45e4-96f7-32667eb79d3f
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Date deposited: 27 Jan 2000
Last modified: 10 Dec 2021 20:27
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Contributors
Author:
G J Parker
Author:
J M Bonar
Author:
C M K Starbuck
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