Erbium diffusion in silicon investigated using enclosed silicon cavities
Erbium diffusion in silicon investigated using enclosed silicon cavities
Roberts, S W
26006cf0-561a-4778-ac84-7dd8aa3a0ffe
Parker, G J
b140c5a5-94c4-44f3-95a3-c5054a9fe38d
August 1995
Roberts, S W
26006cf0-561a-4778-ac84-7dd8aa3a0ffe
Parker, G J
b140c5a5-94c4-44f3-95a3-c5054a9fe38d
Roberts, S W and Parker, G J
(1995)
Erbium diffusion in silicon investigated using enclosed silicon cavities.
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Published date: August 1995
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 252429
URI: http://eprints.soton.ac.uk/id/eprint/252429
PURE UUID: 16573407-8908-4913-a8af-c47e6010a98c
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Date deposited: 27 Jan 2000
Last modified: 10 Dec 2021 20:27
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Contributors
Author:
S W Roberts
Author:
G J Parker
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