Farooqui, M M and Evans, A G R (1992) A novel process for fabricating force sensors for atomic force microscopy. MRS Proceedings, 276. (doi:10.1557/PROC-276-253).
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Published date: 1992
Organisations:
Nanoelectronics and Nanotechnology
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Local EPrints ID: 252433
URI: http://eprints.soton.ac.uk/id/eprint/252433
ISSN: 1946-4274
PURE UUID: d44ee647-d453-4961-aeb7-667c298e04d5
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Date deposited: 28 Jan 2000
Last modified: 09 Apr 2024 16:13
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Author:
M M Farooqui
Author:
A G R Evans
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