A novel process for fabricating force sensors for atomic force microscopy


Farooqui, M M and Evans, A G R (1992) A novel process for fabricating force sensors for atomic force microscopy

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Item Type: Other
Organisations: Nanoelectronics and Nanotechnology
ePrint ID: 252433
Date :
Date Event
1992Published
Date Deposited: 28 Jan 2000
Last Modified: 17 Apr 2017 23:33
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/252433

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