Evans, A G R (1993) Silicon Micromachining and fabrication.
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Published date: 1993
Additional Information:
Address: Southammpton
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 252436
URI: http://eprints.soton.ac.uk/id/eprint/252436
PURE UUID: f18b6693-5b0d-40c3-a9b6-0c17d62916bc
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Date deposited: 28 Jan 2000
Last modified: 10 Dec 2021 20:27
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Author:
A G R Evans
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