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Silicon Micromachining and fabrication

Evans, A G R (1993) Silicon Micromachining and fabrication

Record type: Other

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Published date: 1993
Additional Information: Address: Southammpton
Organisations: Nanoelectronics and Nanotechnology


Local EPrints ID: 252436
PURE UUID: f18b6693-5b0d-40c3-a9b6-0c17d62916bc

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Date deposited: 28 Jan 2000
Last modified: 18 Jul 2017 10:04

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Author: A G R Evans

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