Su, Y., Evans, A.G.R. and Brunnschweiler, A. (2000) Micromachined silicon cantilever paddles for flow sensors. In Micromechanics Europe 1995 Proceedings.
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Conference or Workshop Item
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Published date: 28 January 2000
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 252438
URI: http://eprints.soton.ac.uk/id/eprint/252438
PURE UUID: 9799baed-2a2d-4102-a86e-59aa95c1bb98
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Date deposited: 28 Jan 2000
Last modified: 12 Dec 2021 03:28
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Contributors
Author:
Y. Su
Author:
A.G.R. Evans
Author:
A. Brunnschweiler
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