Micromahined silicon cantilever paddles for flow sensors


Su, Y, Evans, A G R and Brunnschweiler, A (2000) Micromahined silicon cantilever paddles for flow sensors

Download

Full text not available from this repository.

Item Type: Other
Additional Information: Micromechanics Europe 1995 Proceedings.
Organisations: Nanoelectronics and Nanotechnology
ePrint ID: 252438
Date :
Date Event
28 January 2000Published
Date Deposited: 28 Jan 2000
Last Modified: 17 Apr 2017 23:33
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/252438

Actions (login required)

View Item View Item