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Micromahined silicon cantilever paddles for flow sensors

Record type: Other

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Citation

Su, Y, Evans, A G R and Brunnschweiler, A (2000) Micromahined silicon cantilever paddles for flow sensors

More information

Published date: 28 January 2000
Additional Information: Micromechanics Europe 1995 Proceedings.
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 252438
URI: http://eprints.soton.ac.uk/id/eprint/252438
PURE UUID: 9799baed-2a2d-4102-a86e-59aa95c1bb98

Catalogue record

Date deposited: 28 Jan 2000
Last modified: 18 Jul 2017 10:04

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Contributors

Author: Y Su
Author: A G R Evans
Author: A Brunnschweiler

University divisions

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