Koch, M, Evans, A G R and Brunnschweiler, A (1996) Simulation and fabrication of micromachined cantilever valves.
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Published date: September 1996
Additional Information:
Eurosensors X Conference. Address: Leuven, Belgium
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 252439
URI: http://eprints.soton.ac.uk/id/eprint/252439
PURE UUID: c9be1ca1-49d5-470a-89bf-415fbfd49c32
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Date deposited: 28 Jan 2000
Last modified: 10 Dec 2021 20:27
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Contributors
Author:
M Koch
Author:
A G R Evans
Author:
A Brunnschweiler
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