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Simulation and fabrication of micromachined cantilever valves

Simulation and fabrication of micromachined cantilever valves
Simulation and fabrication of micromachined cantilever valves
Koch, M
afb525c3-6353-4bac-93f6-a77de2881db7
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311
Brunnschweiler, A
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Koch, M
afb525c3-6353-4bac-93f6-a77de2881db7
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311
Brunnschweiler, A
2d39ef7c-b95e-476c-b435-316b6618a565

Koch, M, Evans, A G R and Brunnschweiler, A (1996) Simulation and fabrication of micromachined cantilever valves.

Record type: Other

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More information

Published date: September 1996
Additional Information: Eurosensors X Conference. Address: Leuven, Belgium
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 252439
URI: https://eprints.soton.ac.uk/id/eprint/252439
PURE UUID: c9be1ca1-49d5-470a-89bf-415fbfd49c32

Catalogue record

Date deposited: 28 Jan 2000
Last modified: 04 Dec 2017 17:32

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