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Micromachined flow sensors using a piezoresistive cantilever paddle

Micromachined flow sensors using a piezoresistive cantilever paddle
Micromachined flow sensors using a piezoresistive cantilever paddle
A piezoresistive silicon cantilever paddle for measuring gas flow is presented. The paddle square is attached by two cantilever arms with piezoresistive sensing element implanted on the root of the arms. The cantilever paddle is 500 μm long, 40 μm wide and 2.32 μm thick, with a paddle square of 200 by 200 μm. The device resistance change is measured using a Phase Sensitive Detector (PSD) method when the piezoresistor on the device is taken as one of four resistors in ac Wheatstone bridge biased at a voltage of 2.0 V and 10 kHz. The measured airflow velocity is in the range 0 - 22.0 m/sec. The minimum detectable airflow velocity is about 10 cm/sec in our PSD experimental setup. The output signals of the device are in reasonable agreement with the theoretical predictions, which are proportional to the flow velocity squared in the drag measurement mode.
Su, Y.
d9db9af4-ecb1-497f-ba4c-f11afbc2a934
Evans, A.G.R.
c4a3f208-8fd9-491d-870f-ce7eef943311
Brunnschweiler, A.
2d39ef7c-b95e-476c-b435-316b6618a565
Ensell, G.J.
05e24f49-3922-4e5f-9aee-1e6078650579
Su, Y.
d9db9af4-ecb1-497f-ba4c-f11afbc2a934
Evans, A.G.R.
c4a3f208-8fd9-491d-870f-ce7eef943311
Brunnschweiler, A.
2d39ef7c-b95e-476c-b435-316b6618a565
Ensell, G.J.
05e24f49-3922-4e5f-9aee-1e6078650579

Su, Y., Evans, A.G.R., Brunnschweiler, A. and Ensell, G.J. (1996) Micromachined flow sensors using a piezoresistive cantilever paddle. ESSDERC 96 26th European Solid State Device Research Conference, Bologna, Italy. 09 - 11 Sep 1996.

Record type: Conference or Workshop Item (Paper)

Abstract

A piezoresistive silicon cantilever paddle for measuring gas flow is presented. The paddle square is attached by two cantilever arms with piezoresistive sensing element implanted on the root of the arms. The cantilever paddle is 500 μm long, 40 μm wide and 2.32 μm thick, with a paddle square of 200 by 200 μm. The device resistance change is measured using a Phase Sensitive Detector (PSD) method when the piezoresistor on the device is taken as one of four resistors in ac Wheatstone bridge biased at a voltage of 2.0 V and 10 kHz. The measured airflow velocity is in the range 0 - 22.0 m/sec. The minimum detectable airflow velocity is about 10 cm/sec in our PSD experimental setup. The output signals of the device are in reasonable agreement with the theoretical predictions, which are proportional to the flow velocity squared in the drag measurement mode.

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More information

Published date: September 1996
Additional Information: ESSDERC 96 26th European Solid State Device Research Conference. 9-11 Sep in Bologna, Italy
Venue - Dates: ESSDERC 96 26th European Solid State Device Research Conference, Bologna, Italy, 1996-09-09 - 1996-09-11
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 252440
URI: https://eprints.soton.ac.uk/id/eprint/252440
PURE UUID: f6a7e661-de0d-41f3-9e9c-fa6e2f7fa8c6

Catalogue record

Date deposited: 28 Jan 2000
Last modified: 26 Nov 2018 17:30

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Contributors

Author: Y. Su
Author: A.G.R. Evans
Author: A. Brunnschweiler
Author: G.J. Ensell

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