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Micromachined Flow Sensors by using Piezoresisitive Cantilever Paddle

Su, Y, Evans, A G R, Brunnschweiler, A and Ensell, G (1996) Micromachined Flow Sensors by using Piezoresisitive Cantilever Paddle

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Published date: September 1996
Additional Information: ESSDERC 96 26th European Solid State Device Research Conference. Address: Bologna, Italy
Organisations: Nanoelectronics and Nanotechnology

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Local EPrints ID: 252440
URI: http://eprints.soton.ac.uk/id/eprint/252440
PURE UUID: f6a7e661-de0d-41f3-9e9c-fa6e2f7fa8c6

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Date deposited: 28 Jan 2000
Last modified: 18 Jul 2017 10:04

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Contributors

Author: Y Su
Author: A G R Evans
Author: A Brunnschweiler
Author: G Ensell

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