Fabrication of improved piezoresistive Si cantilever probe for the atomic force microscope
Fabrication of improved piezoresistive Si cantilever probe for the atomic force microscope
Su, Y.
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Evans, A.G.R.
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Brunnschweiler, A.
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Ensell, G.
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April 1996
Su, Y.
d9db9af4-ecb1-497f-ba4c-f11afbc2a934
Evans, A.G.R.
c4a3f208-8fd9-491d-870f-ce7eef943311
Brunnschweiler, A.
2d39ef7c-b95e-476c-b435-316b6618a565
Ensell, G.
5ed85009-4be4-4850-b95c-fbb367b67d15
Su, Y., Evans, A.G.R., Brunnschweiler, A. and Ensell, G.
(1996)
Fabrication of improved piezoresistive Si cantilever probe for the atomic force microscope.
UK Scanned probe Microscopy Meeting, St John's College, Oxford, United Kingdom.
Record type:
Conference or Workshop Item
(Paper)
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Published date: April 1996
Additional Information:
UK Scanned probe Microscopy Meeting. Address: St Johns College, Oxford
Venue - Dates:
UK Scanned probe Microscopy Meeting, St John's College, Oxford, United Kingdom, 1996-04-01
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 252442
URI: http://eprints.soton.ac.uk/id/eprint/252442
PURE UUID: fcfe26f9-462a-4592-b0bd-52634d017b29
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Date deposited: 28 Jan 2000
Last modified: 12 Dec 2021 06:24
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Contributors
Author:
Y. Su
Author:
A.G.R. Evans
Author:
A. Brunnschweiler
Author:
G. Ensell
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