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Fabrication of improved piezoresistive Si cantilever probe for the atomic force microscope

Fabrication of improved piezoresistive Si cantilever probe for the atomic force microscope
Fabrication of improved piezoresistive Si cantilever probe for the atomic force microscope
Su, Y.
d9db9af4-ecb1-497f-ba4c-f11afbc2a934
Evans, A.G.R.
c4a3f208-8fd9-491d-870f-ce7eef943311
Brunnschweiler, A.
2d39ef7c-b95e-476c-b435-316b6618a565
Ensell, G.
5ed85009-4be4-4850-b95c-fbb367b67d15
Su, Y.
d9db9af4-ecb1-497f-ba4c-f11afbc2a934
Evans, A.G.R.
c4a3f208-8fd9-491d-870f-ce7eef943311
Brunnschweiler, A.
2d39ef7c-b95e-476c-b435-316b6618a565
Ensell, G.
5ed85009-4be4-4850-b95c-fbb367b67d15

Su, Y., Evans, A.G.R., Brunnschweiler, A. and Ensell, G. (1996) Fabrication of improved piezoresistive Si cantilever probe for the atomic force microscope. UK Scanned probe Microscopy Meeting, Oxford, United Kingdom.

Record type: Conference or Workshop Item (Paper)

Full text not available from this repository.

More information

Published date: April 1996
Additional Information: UK Scanned probe Microscopy Meeting. Address: St Johns College, Oxford
Venue - Dates: UK Scanned probe Microscopy Meeting, Oxford, United Kingdom, 1996-04-01
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 252442
URI: https://eprints.soton.ac.uk/id/eprint/252442
PURE UUID: fcfe26f9-462a-4592-b0bd-52634d017b29

Catalogue record

Date deposited: 28 Jan 2000
Last modified: 11 Nov 2019 17:31

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