Su, Y., Evans, A.G.R., Brunnschweiler, A. and Ensell, G.
Micro-cantilever resonance measured using sound excitation
At MME '97.
Full text not available from this repository.
This paper describes sound-excited vibrations of a silicon cantilever resonator for measuring its resonant frequencies. A strain gauge resistor integrated in the cantilever is used as a sensing element. The experimental setup greatly simplifies the measurement system and is sensitive and easy to operate compared with optical sensing methods. The measured resonant frequencies of the micro-cantilever resonator are in good agreement with the theoretical predictions from FE modeling.
Conference or Workshop Item
|Venue - Dates:
||MME '97, 1997-09-01
||Nanoelectronics and Nanotechnology
||28 Jan 2000
||17 Apr 2017 23:33
|Further Information:||Google Scholar|
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