Micro-cantilever resonance measured using sound excitation

Su, Y., Evans, A.G.R., Brunnschweiler, A. and Ensell, G. (1997) Micro-cantilever resonance measured using sound excitation At MME '97. , pp. 140-143.


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This paper describes sound-excited vibrations of a silicon cantilever resonator for measuring its resonant frequencies. A strain gauge resistor integrated in the cantilever is used as a sensing element. The experimental setup greatly simplifies the measurement system and is sensitive and easy to operate compared with optical sensing methods. The measured resonant frequencies of the micro-cantilever resonator are in good agreement with the theoretical predictions from FE modeling.

Item Type: Conference or Workshop Item (Paper)
Venue - Dates: MME '97, 1997-09-01
Organisations: Nanoelectronics and Nanotechnology
ePrint ID: 252448
Date :
Date Event
September 1997Published
Date Deposited: 28 Jan 2000
Last Modified: 17 Apr 2017 23:33
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/252448

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