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Micro-cantilever resonance measured using sound excitation

Su, Y., Evans, A.G.R., Brunnschweiler, A. and Ensell, G. (1997) Micro-cantilever resonance measured using sound excitation At MME '97. , pp. 140-143.

Record type: Conference or Workshop Item (Paper)


This paper describes sound-excited vibrations of a silicon cantilever resonator for measuring its resonant frequencies. A strain gauge resistor integrated in the cantilever is used as a sensing element. The experimental setup greatly simplifies the measurement system and is sensitive and easy to operate compared with optical sensing methods. The measured resonant frequencies of the micro-cantilever resonator are in good agreement with the theoretical predictions from FE modeling.

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Published date: September 1997
Venue - Dates: MME '97, 1997-09-01
Organisations: Nanoelectronics and Nanotechnology


Local EPrints ID: 252448
PURE UUID: 7dedcbbd-6c7a-48f5-be0d-6118f3ecd7ff

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Date deposited: 28 Jan 2000
Last modified: 18 Jul 2017 10:04

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Author: Y. Su
Author: A.G.R. Evans
Author: A. Brunnschweiler
Author: G. Ensell

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