A novel micromachined pump based on thick-film piezoelectric actuation
A novel micromachined pump based on thick-film piezoelectric actuation
A new silicon-based micropump is described in this paper. The key element of the device is a thick-film/silicon micromachined hybrid actuator. The actuation principle relies on the flexure of a screen printed piezoelectric lead zirconate titanate (PZT) layer on a silicon membrane (8 mm/spl times/4 mm/spl times/70 /spl mu/m). Inlet and outlet valves are of the cantilever type and use deep boron diffusion together with KOH etching. Pump rates of up to 120 /spl mu/I min/sup -1/ have been achieved. A maximum backpressure of 2 kPa was measured when using a 600 V/sub pp/ sinusoidal drive voltage at 200 Hz across a 100 /spl mu/m thick PZT layer.
Koch, M.
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Harris, N.
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Evans, A.G.R.
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White, N.M.
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Brunnschweiler, A.
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1997
Koch, M.
afb525c3-6353-4bac-93f6-a77de2881db7
Harris, N.
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Evans, A.G.R.
c4a3f208-8fd9-491d-870f-ce7eef943311
White, N.M.
ce98ce88-d529-4982-9095-8e88274a523f
Brunnschweiler, A.
2d39ef7c-b95e-476c-b435-316b6618a565
Koch, M., Harris, N., Evans, A.G.R., White, N.M. and Brunnschweiler, A.
(1997)
A novel micromachined pump based on thick-film piezoelectric actuation.
In Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).
IEEE..
(doi:10.1109/SENSOR.1997.613657).
Record type:
Conference or Workshop Item
(Paper)
Abstract
A new silicon-based micropump is described in this paper. The key element of the device is a thick-film/silicon micromachined hybrid actuator. The actuation principle relies on the flexure of a screen printed piezoelectric lead zirconate titanate (PZT) layer on a silicon membrane (8 mm/spl times/4 mm/spl times/70 /spl mu/m). Inlet and outlet valves are of the cantilever type and use deep boron diffusion together with KOH etching. Pump rates of up to 120 /spl mu/I min/sup -1/ have been achieved. A maximum backpressure of 2 kPa was measured when using a 600 V/sub pp/ sinusoidal drive voltage at 200 Hz across a 100 /spl mu/m thick PZT layer.
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Published date: 1997
Venue - Dates:
International Solid State Sensors and Actuators Conference (Transducers '97), , Chicago, United States, 1997-06-16 - 1997-06-19
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 252453
URI: http://eprints.soton.ac.uk/id/eprint/252453
PURE UUID: 72baab80-5ccf-43cc-9543-5f38a2c31af7
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Date deposited: 28 Jan 2000
Last modified: 15 Mar 2024 23:30
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Contributors
Author:
M. Koch
Author:
N. Harris
Author:
A.G.R. Evans
Author:
N.M. White
Author:
A. Brunnschweiler
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