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A novel micromachined pump based on thick-film piezoelectric actuation

A novel micromachined pump based on thick-film piezoelectric actuation
A novel micromachined pump based on thick-film piezoelectric actuation
A new silicon-based micropump is described in this paper. The key element of the device is a thick-film/silicon micromachined hybrid actuator. The actuation principle relies on the flexure of a screen printed piezoelectric lead zirconate titanate (PZT) layer on a silicon membrane (8 mm/spl times/4 mm/spl times/70 /spl mu/m). Inlet and outlet valves are of the cantilever type and use deep boron diffusion together with KOH etching. Pump rates of up to 120 /spl mu/I min/sup -1/ have been achieved. A maximum backpressure of 2 kPa was measured when using a 600 V/sub pp/ sinusoidal drive voltage at 200 Hz across a 100 /spl mu/m thick PZT layer.
IEEE
Koch, M.
afb525c3-6353-4bac-93f6-a77de2881db7
Harris, N.
5f9fc185-56c0-4fdf-b66c-e4c9bea80ab4
Evans, A.G.R.
c4a3f208-8fd9-491d-870f-ce7eef943311
White, N.M.
ce98ce88-d529-4982-9095-8e88274a523f
Brunnschweiler, A.
2d39ef7c-b95e-476c-b435-316b6618a565
Koch, M.
afb525c3-6353-4bac-93f6-a77de2881db7
Harris, N.
5f9fc185-56c0-4fdf-b66c-e4c9bea80ab4
Evans, A.G.R.
c4a3f208-8fd9-491d-870f-ce7eef943311
White, N.M.
ce98ce88-d529-4982-9095-8e88274a523f
Brunnschweiler, A.
2d39ef7c-b95e-476c-b435-316b6618a565

Koch, M., Harris, N., Evans, A.G.R., White, N.M. and Brunnschweiler, A. (1997) A novel micromachined pump based on thick-film piezoelectric actuation. In Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97). IEEE.. (doi:10.1109/SENSOR.1997.613657).

Record type: Conference or Workshop Item (Paper)

Abstract

A new silicon-based micropump is described in this paper. The key element of the device is a thick-film/silicon micromachined hybrid actuator. The actuation principle relies on the flexure of a screen printed piezoelectric lead zirconate titanate (PZT) layer on a silicon membrane (8 mm/spl times/4 mm/spl times/70 /spl mu/m). Inlet and outlet valves are of the cantilever type and use deep boron diffusion together with KOH etching. Pump rates of up to 120 /spl mu/I min/sup -1/ have been achieved. A maximum backpressure of 2 kPa was measured when using a 600 V/sub pp/ sinusoidal drive voltage at 200 Hz across a 100 /spl mu/m thick PZT layer.

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More information

Published date: 1997
Venue - Dates: International Solid State Sensors and Actuators Conference (Transducers '97), , Chicago, United States, 1997-06-16 - 1997-06-19
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 252453
URI: http://eprints.soton.ac.uk/id/eprint/252453
PURE UUID: 72baab80-5ccf-43cc-9543-5f38a2c31af7

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Date deposited: 28 Jan 2000
Last modified: 15 Mar 2024 23:30

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Contributors

Author: M. Koch
Author: N. Harris
Author: A.G.R. Evans
Author: N.M. White
Author: A. Brunnschweiler

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