High-Aspect ratio silicon pillars fabricated by electrochemical etching and oxidation of macroporous silicon


Lau, H W, Parker, G J and Greef, R (1996) High-Aspect ratio silicon pillars fabricated by electrochemical etching and oxidation of macroporous silicon

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Item Type: Other
Organisations: Nanoelectronics and Nanotechnology
ePrint ID: 252489
Date :
Date Event
1996Published
Date Deposited: 31 Jan 2000
Last Modified: 17 Apr 2017 23:33
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/252489

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