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Screen printing of thick piezoelectric PZT layers onto silicon

Screen printing of thick piezoelectric PZT layers onto silicon
Screen printing of thick piezoelectric PZT layers onto silicon
Institution of Engineering and Technology
Koch, M
afb525c3-6353-4bac-93f6-a77de2881db7
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311
Brunnschweiler, A
2d39ef7c-b95e-476c-b435-316b6618a565
Harris, N
5f9fc185-56c0-4fdf-b66c-e4c9bea80ab4
White, N M
ce98ce88-d529-4982-9095-8e88274a523f
Koch, M
afb525c3-6353-4bac-93f6-a77de2881db7
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311
Brunnschweiler, A
2d39ef7c-b95e-476c-b435-316b6618a565
Harris, N
5f9fc185-56c0-4fdf-b66c-e4c9bea80ab4
White, N M
ce98ce88-d529-4982-9095-8e88274a523f

Koch, M, Evans, A G R, Brunnschweiler, A, Harris, N and White, N M (1997) Screen printing of thick piezoelectric PZT layers onto silicon.

Record type: Other

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More information

Published date: 1997
Additional Information: Address: London
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 252502
URI: http://eprints.soton.ac.uk/id/eprint/252502
PURE UUID: 3a94e4b7-f5e5-4161-971c-0d849cc9e6d4

Catalogue record

Date deposited: 07 Feb 2000
Last modified: 05 Mar 2024 17:47

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Contributors

Author: M Koch
Author: A G R Evans
Author: A Brunnschweiler
Author: N Harris
Author: N M White

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