Screen printing of thick piezoelectric PZT layers onto silicon
Screen printing of thick piezoelectric PZT layers onto silicon
Institution of Engineering and Technology
Koch, M
afb525c3-6353-4bac-93f6-a77de2881db7
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311
Brunnschweiler, A
2d39ef7c-b95e-476c-b435-316b6618a565
Harris, N
5f9fc185-56c0-4fdf-b66c-e4c9bea80ab4
White, N M
ce98ce88-d529-4982-9095-8e88274a523f
1997
Koch, M
afb525c3-6353-4bac-93f6-a77de2881db7
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311
Brunnschweiler, A
2d39ef7c-b95e-476c-b435-316b6618a565
Harris, N
5f9fc185-56c0-4fdf-b66c-e4c9bea80ab4
White, N M
ce98ce88-d529-4982-9095-8e88274a523f
Koch, M, Evans, A G R, Brunnschweiler, A, Harris, N and White, N M
(1997)
Screen printing of thick piezoelectric PZT layers onto silicon.
This record has no associated files available for download.
More information
Published date: 1997
Additional Information:
Address: London
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 252502
URI: http://eprints.soton.ac.uk/id/eprint/252502
PURE UUID: 3a94e4b7-f5e5-4161-971c-0d849cc9e6d4
Catalogue record
Date deposited: 07 Feb 2000
Last modified: 12 Jul 2022 16:38
Export record
Contributors
Author:
M Koch
Author:
A G R Evans
Author:
A Brunnschweiler
Author:
N Harris
Author:
N M White
Download statistics
Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.
View more statistics