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Screen printing of thick piezoelectric PZT layers onto silicon

Koch, M, Evans, A G R, Brunnschweiler, A, Harris, N and White, N M (1997) Screen printing of thick piezoelectric PZT layers onto silicon

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Published date: 1997
Additional Information: Address: London
Organisations: Nanoelectronics and Nanotechnology


Local EPrints ID: 252502
PURE UUID: 3a94e4b7-f5e5-4161-971c-0d849cc9e6d4

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Date deposited: 07 Feb 2000
Last modified: 18 Jul 2017 10:04

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Author: M Koch
Author: A G R Evans
Author: A Brunnschweiler
Author: N Harris
Author: N M White

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