Koch, M, Evans, A G R, Brunnschweiler, A, Harris, N and White, N M (1997) Screen printing of thick piezoelectric PZT layers onto silicon.
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More information
Published date: 1997
Additional Information:
Address: London
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 252502
URI: http://eprints.soton.ac.uk/id/eprint/252502
PURE UUID: 3a94e4b7-f5e5-4161-971c-0d849cc9e6d4
Catalogue record
Date deposited: 07 Feb 2000
Last modified: 12 Jul 2022 16:38
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Contributors
Author:
M Koch
Author:
A G R Evans
Author:
A Brunnschweiler
Author:
N Harris
Author:
N M White
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