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Screen printing of thick piezoelectric PZT layers onto silicon

Screen printing of thick piezoelectric PZT layers onto silicon
Screen printing of thick piezoelectric PZT layers onto silicon
IEE Colliquium on Recent Advances in micromachining techniques
Koch, M
afb525c3-6353-4bac-93f6-a77de2881db7
Evans, A G R
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Brunnschweiler, A
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Harris, N
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White, N M
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Koch, M
afb525c3-6353-4bac-93f6-a77de2881db7
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311
Brunnschweiler, A
2d39ef7c-b95e-476c-b435-316b6618a565
Harris, N
5f9fc185-56c0-4fdf-b66c-e4c9bea80ab4
White, N M
ce98ce88-d529-4982-9095-8e88274a523f

Koch, M, Evans, A G R, Brunnschweiler, A, Harris, N and White, N M (1997) Screen printing of thick piezoelectric PZT layers onto silicon.

Record type: Other

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More information

Published date: 1997
Additional Information: Address: London
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 252502
URI: https://eprints.soton.ac.uk/id/eprint/252502
PURE UUID: 3a94e4b7-f5e5-4161-971c-0d849cc9e6d4

Catalogue record

Date deposited: 07 Feb 2000
Last modified: 04 Dec 2017 17:32

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