Thick film printing of PZT onto Silicon for micromechancial applications


Harris, N, Koch, M, Beevy, S, White, N M and Evans, A G R (2000) Thick film printing of PZT onto Silicon for micromechancial applications

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Item Type: Other
Additional Information: Procceding of MM'98 Ulvik, Norway.
Organisations: Nanoelectronics and Nanotechnology
ePrint ID: 252510
Date :
Date Event
9 February 2000Published
Date Deposited: 09 Feb 2000
Last Modified: 17 Apr 2017 23:33
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/252510

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