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Thick film printing of PZT onto Silicon for micromechancial applications

Thick film printing of PZT onto Silicon for micromechancial applications
Thick film printing of PZT onto Silicon for micromechancial applications
Harris, N
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Koch, M
afb525c3-6353-4bac-93f6-a77de2881db7
Beevy, S
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White, N M
ce98ce88-d529-4982-9095-8e88274a523f
Evans, A G R
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Harris, N
5f9fc185-56c0-4fdf-b66c-e4c9bea80ab4
Koch, M
afb525c3-6353-4bac-93f6-a77de2881db7
Beevy, S
4dd5bfa4-9756-40fa-a285-f0547183a938
White, N M
ce98ce88-d529-4982-9095-8e88274a523f
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311

Harris, N, Koch, M, Beevy, S, White, N M and Evans, A G R (2000) Thick film printing of PZT onto Silicon for micromechancial applications.

Record type: Other

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More information

Published date: 9 February 2000
Additional Information: Procceding of MM'98 Ulvik, Norway.
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 252510
URI: https://eprints.soton.ac.uk/id/eprint/252510
PURE UUID: 82ce1899-97cd-4411-8db2-7feee9ea134b

Catalogue record

Date deposited: 09 Feb 2000
Last modified: 18 Jul 2017 10:04

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