Mathematical model for a micromachined accelerometer
Mathematical model for a micromachined accelerometer
A mathematical model is developed for both open- and closed-loop accelerometers having capacitive sensing and electrostatic feedback. Test results on actual micromachined devices are compared with simulation employing the mathematical model.
92-98
Lewis, C P
2a2442fd-0c3d-441f-8a48-5d4259e13785
Kraft, Michael
c2ff2439-b909-4af3-824d-9d7c0d14dc3e
Hesketh, T G
961150c1-f814-4c03-9315-4455693867d1
10 April 1996
Lewis, C P
2a2442fd-0c3d-441f-8a48-5d4259e13785
Kraft, Michael
c2ff2439-b909-4af3-824d-9d7c0d14dc3e
Hesketh, T G
961150c1-f814-4c03-9315-4455693867d1
Lewis, C P, Kraft, Michael and Hesketh, T G
(1996)
Mathematical model for a micromachined accelerometer.
Transactions of the Institute of Measurement and Control, 18 (2), .
(doi:10.1177/0142331296018002).
Abstract
A mathematical model is developed for both open- and closed-loop accelerometers having capacitive sensing and electrostatic feedback. Test results on actual micromachined devices are compared with simulation employing the mathematical model.
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More information
Published date: 10 April 1996
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 252685
URI: http://eprints.soton.ac.uk/id/eprint/252685
ISSN: 0142-3312
PURE UUID: 795aaab4-4e31-440e-a9c3-4a3bde5ce758
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Date deposited: 10 Mar 2000
Last modified: 16 Mar 2024 22:47
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Contributors
Author:
C P Lewis
Author:
Michael Kraft
Author:
T G Hesketh
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