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Mathematical model for a micromachined accelerometer

Mathematical model for a micromachined accelerometer
Mathematical model for a micromachined accelerometer
A mathematical model is developed for both open- and closed-loop accelerometers having capacitive sensing and electrostatic feedback. Test results on actual micromachined devices are compared with simulation employing the mathematical model.
0142-3312
92-98
Lewis, C P
2a2442fd-0c3d-441f-8a48-5d4259e13785
Kraft, Michael
c2ff2439-b909-4af3-824d-9d7c0d14dc3e
Hesketh, T G
961150c1-f814-4c03-9315-4455693867d1
Lewis, C P
2a2442fd-0c3d-441f-8a48-5d4259e13785
Kraft, Michael
c2ff2439-b909-4af3-824d-9d7c0d14dc3e
Hesketh, T G
961150c1-f814-4c03-9315-4455693867d1

Lewis, C P, Kraft, Michael and Hesketh, T G (1996) Mathematical model for a micromachined accelerometer. Transactions of the Institute of Measurement and Control, 18 (2), 92-98. (doi:10.1177/0142331296018002).

Record type: Article

Abstract

A mathematical model is developed for both open- and closed-loop accelerometers having capacitive sensing and electrostatic feedback. Test results on actual micromachined devices are compared with simulation employing the mathematical model.

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More information

Published date: 10 April 1996
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 252685
URI: http://eprints.soton.ac.uk/id/eprint/252685
ISSN: 0142-3312
PURE UUID: 795aaab4-4e31-440e-a9c3-4a3bde5ce758

Catalogue record

Date deposited: 10 Mar 2000
Last modified: 16 Mar 2024 22:47

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Contributors

Author: C P Lewis
Author: Michael Kraft
Author: T G Hesketh

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