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Blazed grating couplers on Unibond SOI

Blazed grating couplers on Unibond SOI
Blazed grating couplers on Unibond SOI
Grating couplers can be more efficient than end-fire coupling, in coupling light into a thin film waveguide. The aim of this work is to fabricate a low cost, highly efficient silicon waveguide grating coupler which is to be use data the telecommunication wavelength of 1.3 micrometers. Silicon-on-insulator (SOI) is chosen for fabricating the gratings as it is low cost using the exiting silicon technology. Unibond wafers were used because they offer flexibility in the choice of the thickness' of both the silicon film and the buried oxide layer, and they have low optical waveguide loss. The wafers used in this work have a Si film thickness of 1.14 μm and a SiO2 buried layer thickness of 0.67 μm. Gratings that have asymmetrical profiles, such as blazed gratings are known to have higher directionality than the symmetrical rectangular gratings, and hence a higher output efficiency. Using perturbation theory, Si blazed gratings with an optimum grating height were predicted to have a maximum output efficiency of the order of 90% towards the substrate. The design and fabrication of the blazed gratings will be discussed in this paper.
SPIE
Ang, T.W.
39b01065-853c-44df-b089-17831a326efe
Vonsovici, A.
a400a2ee-0560-40e0-8d7f-648d18ecbbdf
Reed, G.T.
ca08dd60-c072-4d7d-b254-75714d570139
Evans, A.G.R.
c4a3f208-8fd9-491d-870f-ce7eef943311
Routley, P.R.
f4d380d9-54c2-4e4d-8eb8-d8ce26bca987
Josey, M.R.
8e0dadcf-4df3-43ff-9cab-cb7810cd7025
Osinski, Marek
Chua, Soo-Jin
Chichibu, Shigefusa F.
Ang, T.W.
39b01065-853c-44df-b089-17831a326efe
Vonsovici, A.
a400a2ee-0560-40e0-8d7f-648d18ecbbdf
Reed, G.T.
ca08dd60-c072-4d7d-b254-75714d570139
Evans, A.G.R.
c4a3f208-8fd9-491d-870f-ce7eef943311
Routley, P.R.
f4d380d9-54c2-4e4d-8eb8-d8ce26bca987
Josey, M.R.
8e0dadcf-4df3-43ff-9cab-cb7810cd7025
Osinski, Marek
Chua, Soo-Jin
Chichibu, Shigefusa F.

Ang, T.W., Vonsovici, A., Reed, G.T., Evans, A.G.R., Routley, P.R. and Josey, M.R. (1999) Blazed grating couplers on Unibond SOI. Osinski, Marek, Chua, Soo-Jin and Chichibu, Shigefusa F. (eds.) In Design, Fabrication, and Characterization of Photonic Devices. vol. 3896, SPIE.. (doi:10.1117/12.370333).

Record type: Conference or Workshop Item (Paper)

Abstract

Grating couplers can be more efficient than end-fire coupling, in coupling light into a thin film waveguide. The aim of this work is to fabricate a low cost, highly efficient silicon waveguide grating coupler which is to be use data the telecommunication wavelength of 1.3 micrometers. Silicon-on-insulator (SOI) is chosen for fabricating the gratings as it is low cost using the exiting silicon technology. Unibond wafers were used because they offer flexibility in the choice of the thickness' of both the silicon film and the buried oxide layer, and they have low optical waveguide loss. The wafers used in this work have a Si film thickness of 1.14 μm and a SiO2 buried layer thickness of 0.67 μm. Gratings that have asymmetrical profiles, such as blazed gratings are known to have higher directionality than the symmetrical rectangular gratings, and hence a higher output efficiency. Using perturbation theory, Si blazed gratings with an optimum grating height were predicted to have a maximum output efficiency of the order of 90% towards the substrate. The design and fabrication of the blazed gratings will be discussed in this paper.

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More information

Published date: November 1999
Additional Information: Proceedings SPIE International Symposium on Photonics and Applications, 1999, Singapore
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 252707
URI: https://eprints.soton.ac.uk/id/eprint/252707
PURE UUID: 183bde14-eb49-450e-88ae-27da05746bb7

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Date deposited: 08 May 2000
Last modified: 22 Oct 2018 16:30

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Contributors

Author: T.W. Ang
Author: A. Vonsovici
Author: G.T. Reed
Author: A.G.R. Evans
Author: P.R. Routley
Author: M.R. Josey
Editor: Marek Osinski
Editor: Soo-Jin Chua
Editor: Shigefusa F. Chichibu

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