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Low thermal budget SiGe CMOS process

Low thermal budget SiGe CMOS process
Low thermal budget SiGe CMOS process
Evans, A G R
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Straube, U N
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Waite, A
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Sidek, R
e2534fb7-43ec-4775-9a90-c7d93b907273
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311
Straube, U N
f83df843-cd85-4d4e-8ddd-73d77b9c9215
Waite, A
01666e1d-ef61-4f3a-938f-722c5b7fdef9
Sidek, R
e2534fb7-43ec-4775-9a90-c7d93b907273

Evans, A G R, Straube, U N, Waite, A and Sidek, R (1999) Low thermal budget SiGe CMOS process.

Record type: Other

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More information

Published date: November 1999
Additional Information: Organisation: EPSRC, London
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 252717
URI: http://eprints.soton.ac.uk/id/eprint/252717
PURE UUID: e1e2aee2-a9b0-43e7-9477-6c1eb2ada6d2

Catalogue record

Date deposited: 14 Apr 2000
Last modified: 22 Sep 2020 16:44

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Contributors

Author: A G R Evans
Author: U N Straube
Author: A Waite
Author: R Sidek

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