Long term stability of silicon bridge oscillators fabricated using Boron Etch Stop
Long term stability of silicon bridge oscillators fabricated using Boron Etch Stop
Pember, A.
9905c7b7-ae71-4710-aa23-f6dbaebc42e9
Smith, J.G.
e6dd8bc8-de64-4d4e-8856-0b4f8587f122
Kemhadjian, H.A.
a60ec87d-ecf4-4417-928f-2f9b5918242b
September 1994
Pember, A.
9905c7b7-ae71-4710-aa23-f6dbaebc42e9
Smith, J.G.
e6dd8bc8-de64-4d4e-8856-0b4f8587f122
Kemhadjian, H.A.
a60ec87d-ecf4-4417-928f-2f9b5918242b
Pember, A., Smith, J.G. and Kemhadjian, H.A.
(1994)
Long term stability of silicon bridge oscillators fabricated using Boron Etch Stop.
Event: Eurosensors VIII: Toulouse, France, September 25-28, 1994, , Toulouse, France.
25 - 28 Sep 1994.
Record type:
Conference or Workshop Item
(Paper)
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Published date: September 1994
Venue - Dates:
Event: Eurosensors VIII: Toulouse, France, September 25-28, 1994, , Toulouse, France, 1994-09-25 - 1994-09-28
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 252775
URI: http://eprints.soton.ac.uk/id/eprint/252775
PURE UUID: 7f146ff2-0636-455e-9b40-1fab51e729ca
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Date deposited: 20 Mar 2000
Last modified: 07 Aug 2023 16:30
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Contributors
Author:
A. Pember
Author:
J.G. Smith
Author:
H.A. Kemhadjian
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