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Long Term Stability of Silicon Bridge Oscillators Fabricated using Boron Etch Stop

Long Term Stability of Silicon Bridge Oscillators Fabricated using Boron Etch Stop
Long Term Stability of Silicon Bridge Oscillators Fabricated using Boron Etch Stop
Pember, A
9905c7b7-ae71-4710-aa23-f6dbaebc42e9
Smith, J G
e6dd8bc8-de64-4d4e-8856-0b4f8587f122
Kemhadjian, H A
a60ec87d-ecf4-4417-928f-2f9b5918242b
Pember, A
9905c7b7-ae71-4710-aa23-f6dbaebc42e9
Smith, J G
e6dd8bc8-de64-4d4e-8856-0b4f8587f122
Kemhadjian, H A
a60ec87d-ecf4-4417-928f-2f9b5918242b

Pember, A, Smith, J G and Kemhadjian, H A (1994) Long Term Stability of Silicon Bridge Oscillators Fabricated using Boron Etch Stop.

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More information

Published date: 1994
Additional Information: Organisation: Eurosensors
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 252775
URI: https://eprints.soton.ac.uk/id/eprint/252775
PURE UUID: 7f146ff2-0636-455e-9b40-1fab51e729ca

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Date deposited: 20 Mar 2000
Last modified: 18 Jul 2017 10:01

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