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Study of the effect of Boron Doping on the Ageing of Silicon Micromachined Cantilevers

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Citation

Pember, A, Smith, J G and Kemhadjian, H A (1970) Study of the effect of Boron Doping on the Ageing of Silicon Micromachined Cantilevers

More information

Published date: 1 January 1970
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 252777
URI: http://eprints.soton.ac.uk/id/eprint/252777
PURE UUID: 01405fd2-9500-46fc-801d-8c27df0f143c

Catalogue record

Date deposited: 20 Mar 2000
Last modified: 18 Jul 2017 10:01

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Contributors

Author: A Pember
Author: J G Smith
Author: H A Kemhadjian

University divisions


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