Study of the effect of Boron Doping on the ageing of Silicon Micromachined Cantilevers

Pember, A, Smith, J G and Kemhadjian, H A (1995) Study of the effect of Boron Doping on the ageing of Silicon Micromachined Cantilevers.

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Published date: 1995

Organisations: Nanoelectronics and Nanotechnology

Local EPrints ID: 252778

URI: http://eprints.soton.ac.uk/id/eprint/252778

PURE UUID: 9e163e43-fa1a-4332-926b-e38e249da696

Date deposited: 20 Mar 2000

Last modified: 22 Sep 2020 16:44

Author: A Pember

Author: J G Smith

Author: H A Kemhadjian

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