Study of the effect of Boron Doping on the ageing of Silicon Micromachined Cantilevers
Study of the effect of Boron Doping on the ageing of Silicon Micromachined Cantilevers
Pember, A
9905c7b7-ae71-4710-aa23-f6dbaebc42e9
Smith, J G
e6dd8bc8-de64-4d4e-8856-0b4f8587f122
Kemhadjian, H A
a60ec87d-ecf4-4417-928f-2f9b5918242b
1995
Pember, A
9905c7b7-ae71-4710-aa23-f6dbaebc42e9
Smith, J G
e6dd8bc8-de64-4d4e-8856-0b4f8587f122
Kemhadjian, H A
a60ec87d-ecf4-4417-928f-2f9b5918242b
Pember, A, Smith, J G and Kemhadjian, H A
(1995)
Study of the effect of Boron Doping on the ageing of Silicon Micromachined Cantilevers.
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Published date: 1995
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 252778
URI: http://eprints.soton.ac.uk/id/eprint/252778
PURE UUID: 9e163e43-fa1a-4332-926b-e38e249da696
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Date deposited: 20 Mar 2000
Last modified: 22 Sep 2020 16:44
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Contributors
Author:
A Pember
Author:
J G Smith
Author:
H A Kemhadjian
University divisions
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