Study of the effect of Boron Doping on the ageing of Silicon Micromachined Cantilevers


Pember, A, Smith, J G and Kemhadjian, H A (1995) Study of the effect of Boron Doping on the ageing of Silicon Micromachined Cantilevers

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Item Type: Other
Organisations: Nanoelectronics and Nanotechnology
ePrint ID: 252778
Date :
Date Event
1995Published
Date Deposited: 20 Mar 2000
Last Modified: 17 Apr 2017 23:29
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/252778

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