Focused Beam Implanter Trends
Focused Beam Implanter Trends
Burgraaf, P
dfb548bf-0371-4dc5-9339-619582e76138
Parker, G J
b140c5a5-94c4-44f3-95a3-c5054a9fe38d
Thompson, W
74fb7298-d1c1-477a-81af-844e9a3ca234
April 1986
Burgraaf, P
dfb548bf-0371-4dc5-9339-619582e76138
Parker, G J
b140c5a5-94c4-44f3-95a3-c5054a9fe38d
Thompson, W
74fb7298-d1c1-477a-81af-844e9a3ca234
Burgraaf, P, Parker, G J and Thompson, W
(1986)
Focused Beam Implanter Trends.
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More information
Published date: April 1986
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 252781
URI: http://eprints.soton.ac.uk/id/eprint/252781
PURE UUID: daf38da0-f5fd-4fc6-805b-9eb353c4dd39
Catalogue record
Date deposited: 21 Mar 2000
Last modified: 10 Dec 2021 20:29
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Contributors
Author:
P Burgraaf
Author:
G J Parker
Author:
W Thompson
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