Parker, G.J. and Starbuck, C.M.K (2000) Selective Silicon Epitaxy without Chlorine Chemistry.
Record type:
Other
This record has no associated files available for download.
More information
Published date: 14 April 2000
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 252782
URI: http://eprints.soton.ac.uk/id/eprint/252782
PURE UUID: be1f5d5a-19d2-4435-9e34-070fbf5872a8
Catalogue record
Date deposited: 21 Mar 2000
Last modified: 26 Feb 2024 19:33
Export record
Contributors
Author:
G.J. Parker
Author:
C.M.K Starbuck
Download statistics
Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.