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Selective Silicon Epitaxy without Chlorine Chemistry

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Citation

Starbuck, C M K and Parker, G J (2000) Selective Silicon Epitaxy without Chlorine Chemistry

More information

Published date: 21 March 2000
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 252782
URI: http://eprints.soton.ac.uk/id/eprint/252782
PURE UUID: be1f5d5a-19d2-4435-9e34-070fbf5872a8

Catalogue record

Date deposited: 21 Mar 2000
Last modified: 18 Jul 2017 10:02

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Contributors

Author: C M K Starbuck
Author: G J Parker

University divisions

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