Parker, G.J. and Starbuck, C.M.K. (1991) A new semiconductor deposition system.
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More information
Published date: 1991
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 252783
URI: http://eprints.soton.ac.uk/id/eprint/252783
ISBN: 0854323821
PURE UUID: 1b32ca3d-ca72-4b63-9f7c-10103d6b6917
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Date deposited: 21 Mar 2000
Last modified: 10 Dec 2021 20:29
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Contributors
Author:
G.J. Parker
Author:
C.M.K. Starbuck
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