The University of Southampton
University of Southampton Institutional Repository

A new semiconductor deposition system

A new semiconductor deposition system
A new semiconductor deposition system
0854323821
Parker, G.J.
b140c5a5-94c4-44f3-95a3-c5054a9fe38d
Starbuck, C.M.K.
a85acc65-f4ee-46aa-a608-817d9993f8fd
Parker, G.J.
b140c5a5-94c4-44f3-95a3-c5054a9fe38d
Starbuck, C.M.K.
a85acc65-f4ee-46aa-a608-817d9993f8fd

Parker, G.J. and Starbuck, C.M.K. (1991) A new semiconductor deposition system.

Record type: Other

Full text not available from this repository.

More information

Published date: 1991
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 252783
URI: https://eprints.soton.ac.uk/id/eprint/252783
ISBN: 0854323821
PURE UUID: 1b32ca3d-ca72-4b63-9f7c-10103d6b6917

Catalogue record

Date deposited: 21 Mar 2000
Last modified: 28 Nov 2018 17:31

Export record

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of https://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×