A Silicon-Based Fabrication Process for the Production of Optical Waveguides
A Silicon-Based Fabrication Process for the Production of Optical Waveguides
Johnston, I R
dd992ee6-85bc-4adf-b044-a80dde74f65b
Parker, G J
b140c5a5-94c4-44f3-95a3-c5054a9fe38d
1995
Johnston, I R
dd992ee6-85bc-4adf-b044-a80dde74f65b
Parker, G J
b140c5a5-94c4-44f3-95a3-c5054a9fe38d
Johnston, I R and Parker, G J
(1995)
A Silicon-Based Fabrication Process for the Production of Optical Waveguides.
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Published date: 1995
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 252784
URI: http://eprints.soton.ac.uk/id/eprint/252784
PURE UUID: a5b857ab-3f53-4d6e-8d19-aecabbf2ca7d
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Date deposited: 21 Mar 2000
Last modified: 10 Dec 2021 20:29
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Contributors
Author:
I R Johnston
Author:
G J Parker
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