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Silicon based microelectrodes for neurophysiology fabricated using a gold metalisation/nitride passivation system

Silicon based microelectrodes for neurophysiology fabricated using a gold metalisation/nitride passivation system
Silicon based microelectrodes for neurophysiology fabricated using a gold metalisation/nitride passivation system
Ensell, G J
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Banks, D
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Ewins, D
53e20392-af18-48b8-93be-bb8146e68c7a
Balachandran, W
1da99646-5daf-4f3e-ae57-50841e836a89
Ensell, G J
05e24f49-3922-4e5f-9aee-1e6078650579
Banks, D
7ff005d7-0d07-4822-9013-4889c2f40657
Ewins, D
53e20392-af18-48b8-93be-bb8146e68c7a
Balachandran, W
1da99646-5daf-4f3e-ae57-50841e836a89

Ensell, G J, Banks, D, Ewins, D and Balachandran, W (1996) Silicon based microelectrodes for neurophysiology fabricated using a gold metalisation/nitride passivation system.

Record type: Other

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More information

Published date: 1996
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 252818
URI: http://eprints.soton.ac.uk/id/eprint/252818
PURE UUID: 67c0b2f9-af58-4982-9e6b-661151173d44

Catalogue record

Date deposited: 23 Mar 2000
Last modified: 10 Dec 2021 20:29

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Contributors

Author: G J Ensell
Author: D Banks
Author: D Ewins
Author: W Balachandran

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